Synonym: ZRCMMM, ZrD-CO4

CAS Number 916597-01-8 | MDL Number MFCD16875687 

ZRCMMM chemical structure

Product codeZR7018
CAS number916597-01-8
Assay (purity)98.5%+
Purity methodby integration NMR H1
NMR H1conforms to structure
Molecular weight295.53 g/mol
Melting point-80 to -75 °C (-112 to -103 °F)
Boiling point111 °C (232 °F) at 0.7 hPa (0.5 mmHg)
Appearancecolorless to light yellow liquid
Sensitivityair, moisture
Molecular formulaC14H20OZr
Linear formulaZr(CH3C5H4)2CH3OCH3
Packagingglassware/metal containers/bubblers

Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium is used as a precursor for the Atomic Layer Deposition of ZrO2 thin films. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing ZR7018 contact us at

Safety information

UNNot regulated
Hazardous classNot regulated
Packing groupNot regulated
Signal wordWARNING
Hazard statementsH302-H315-H319
Precautionary statementsP264-P270-P280-P301 + P310-P302 + P352-P305 + P351 + P338-P330-P332 + P313-P337 + P313-P362
Transport descriptionOrganometallic substance, liquid, water-reactive, flammable (Tris(diethylamido)(tert- butylimido) tantalum(V)
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium below please contact customer support at

Lot# 015/768

External identifiers for ZRCMMM

Pubchem CID11748461
IUPAC Namecarbanide;cyclopentane;propan-1-ol;zirconium(2+)
InchI IdentifierInChI=1S/2C5H5.C3H7O.CH3.Zr/c2*1-2-4-5-3-1;1-2-3-4;;/h2*1-5H;3-4H,2H2,1H3;1H3;/q;;2*-1;+2

Known applications and external links

With Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium other customers often ask:

Ereztech synthesizes and sells additional ZR-compounds.

To purchase ZR7018 contact us at