Bis(methyl-η⁵-cyclopentadienyl)methoxymethylzirconium

Synonym: ZRCMMM, ZrD-CO₄

CAS Number 916597-01-8 | MDL Number MFCD16875687 

Product code	ZR7018
CAS number	916597-01-8
Assay (purity)	98.5%+
Purity method	by integration NMR H1
NMR H1	conforms to structure
Molecular weight	295.53 g/mol
Melting point	-80 to -75 °C (-112 to -103 °F)
Boiling point	111 °C (232 °F) at 0.7 hPa (0.5 mmHg)
Form	liquid
Appearance	colorless to light yellow liquid
Sensitivity	air, moisture
Molecular formula	C14H20OZr
Linear formula	Zr(CH3C5H4)2CH3OCH3
Packaging	glassware/metal containers/bubblers

Bis(methyl-η⁵-cyclopentadienyl)methoxymethylzirconium is used as a precursor for the Atomic Layer Deposition of ZrO2 thin films. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing ZR7018 contact us at sales@ereztech.com

Safety information

UN	Not regulated
Hazardous class	Not regulated
Packing group	Not regulated
Pictograms
Signal word	WARNING
Hazard statements	H302-H315-H319
Precautionary statements	P264-P270-P280-P301 + P310-P302 + P352-P305 + P351 + P338-P330-P332 + P313-P337 + P313-P362
Transport description	Organometallic substance, liquid, water-reactive, flammable (Tris(diethylamido)(tert- butylimido) tantalum(V)
In TSCA registry	No (research and development usage only)

First Aid Measures

General advice	Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact	Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact	Wash off with soap and plenty of water. Consult a physician.
Inhalation	If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed	Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium below please contact customer support at sales@ereztech.com

Lot# 015/768

External identifiers for ZRCMMM

Pubchem CID	11748461
IUPAC Name	carbanide;cyclopentane;propan-1-ol;zirconium(2+)
SMILES	[CH3-].CC[CH-]O.[CH]1[CH][CH][CH][CH]1.[CH]1[CH][CH][CH][CH]1.[Zr+2]
InchI Identifier	InChI=1S/2C5H5.C3H7O.CH3.Zr/c2*1-2-4-5-3-1;1-2-3-4;;/h2*1-5H;3-4H,2H2,1H3;1H3;/q;;2*-1;+2
InchI Key	LRWJSBOVKBMWCR-UHFFFAOYSA-N

Known applications and external links

• Charles Dezelah, Jaakko Niinistö, Frans Munnik, Kaupo Kukli, Jun Lu, Mikko Ritala, Markku Leskelä, Lauri Niinistö The Atomic Layer Deposition of HfO2 and ZrO2 using Advanced Metallocene Precursors and H2O as the Oxygen Source. Chemical Vapor Deposition 14(11‐12):358 – 365 · November 2008
• Éamon O’Connor, Mattia Halter , Felix Eltes, Marilyne Sousa, Andrew Kellock, Stefan Abel, Jean Fompeyrine Stabilization of ferroelectric HfxZr1−xO2 films using a millisecond flash lamp annealing technique. APL Materials 6(12)

With Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium other customers often ask:

• Pentamethylcyclopentadienylzirconium trichloride
• Bis(cyclopentadienyl)zirconium dichloride
• Zirconium(IV)isopropoxide
• Zirconium tetrakis(2,2,6,6-tetramethyl- 3,5-heptanedionate)

Ereztech synthesizes and sells additional ZR-compounds.

To purchase ZR7018 contact us at sales@ereztech.com