Synonym:  BTBAS, Bis(tert-butylamino)silane, Bis(tert-butylamido) silane

CAS Number 186598-40-3 | MDL Number MFCD03411245 | EC Number 631-589-8  

BTBAS Chemical Structure


Product codeSI8403
CAS number186598-40-3
Assay (purity)99.8%+
Metal purity99.999%-SI
Molecular weight174.36
Appearancecolorless liquid
Melting point<-40 °C (-40 °F)
Boiling point167 °C (332.6 °F)
Flash point30 °C (86 °F)
Molecular formulaC8H22N2Si
Linear formula[NH(C4H9)]2SiH2
Packagingglassware/metal containers/bubblers

Bis(t-butylamino)silane is a useful reagent, catalyst, and precursor. It is applicated in thin film deposition. Aminosilanes are the best choice as Si source for the deposition of hafnium silicates (HfSiO) and hafnium silicon oxynitrides (HfSiON).

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Bis(t-butylamino)silane contact us at

Safety information

Hazardous class3(8)
Packing groupII
Signal wordDANGER
Hazard statementsH226-H260-H301-H314-H318-H332-H402-H412
Precautionary statementsP210-P223-P231 + P232-P233-P240-P241-P242-P243-P261-P264-P270-P271-P273-P280-P301 + P310-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P330-P334 + P335-P363-P370 + P378-P391
Transport descriptionFlammable liquid,corrosive n.o.s.(Bis(tert-butylamino) silane)
In TSCA registryNo (for research and development only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

Certificates of analysis (CoA)

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External identifiers for BTBAS

Pubchem CID21904012
IUPAC NameN-(tert-butylamino)silyl-2-methylpropan-2-amine
InchI IdentifierInChI=1S/C8H22N2Si/c1-7(2,3)9-11-10-8(4,5)6/h9-10H,11H2,1-6H3

Known applications and external links

With Bis(t-butylamino)silane other customers often ask:

Ereztech synthesizes and sells additional SI-compounds.

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