Bis(t-butylamino)silane
Synonym: BTBAS, Bis(tert-butylamino)silane, Bis(tert-butylamido) silane
CAS Number 186598-40-3 | MDL Number MFCD03411245 | EC Number 631-589-8
Bis(t-butylamino)silane, also known as BTBAS or bis(tert-butylamino)silane, is a colorless liquid with the molecular formula C₈H₂₂N₂Si and a molecular weight of 174.36 g/mol. This compound has a purity of 99.50%, verified by gas chromatography (GC), and a silicon metal purity of 99.999%-Si. It is primarily used in advanced material applications, particularly in the semiconductor industry, due to its ability to act as a silicon precursor.
BTBAS is commonly utilized in chemical vapor deposition (CVD) processes to produce silicon-based thin films, which are critical for manufacturing microelectronics and other high-tech components. The compound’s liquid form and high volatility make it ideal for delivering silicon in a controlled manner during deposition processes. These films are integral to the development of electronic devices, including transistors, integrated circuits, and other components that require precise silicon layers.
The compound is sensitive to heat and highly flammable (H226), and it must be handled with caution due to its potential hazards. It can also react violently with water (H260), releasing flammable gases. Proper storage in a moisture-free environment is essential to prevent unwanted reactions. Additionally, BTBAS can cause severe skin burns and eye damage (H314, H318) and poses risks if inhaled or ingested (H301, H332).
Due to its reactivity, bis(tert-butylamino)silane should only be handled with proper personal protective equipment, including gloves, safety goggles, and respiratory protection. Its use in well-ventilated areas is crucial to avoid exposure to fumes and potential health hazards.
BTBAS is a highly reactive, high-purity silicon precursor widely used in CVD processes for thin-film deposition. Its role in semiconductor manufacturing highlights its importance in high-tech industries, although care must be taken to handle and store it safely due to its flammability and hazardous nature.
Bis(t-butylamino)silane is a useful reagent, catalyst, and precursor. It is applicated in thin film deposition. Aminosilanes are the best choice as Si source for the deposition of hafnium silicates (HfSiO) and hafnium silicon oxynitrides (HfSiON).
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Bis(t-butylamino)silane contact us at sales@ereztech.com
Safety information
| UN | 2924 |
| Hazardous class | 3(8) |
| Packing group | II |
| Pictograms |     |
| Signal word | DANGER |
| Hazard statements | H226-H260-H301-H314-H318-H332-H402-H412 |
| Precautionary statements | P210-P223-P231 + P232-P233-P240-P241-P242-P243-P261-P264-P270-P271-P273-P280-P301 + P310-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P330-P334 + P335-P363-P370 + P378-P391 |
| Transport description | Flammable liquid,corrosive n.o.s.(Bis(tert-butylamino) silane) |
| In TSCA registry | No (for research and development only) |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of analysis (CoA)
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External identifiers for BTBAS
| Pubchem CID | 21904012 |
| SMILES | CC(C)(C)N[SiH2]NC(C)(C)C |
| IUPAC Name | N-(tert-butylamino)silyl-2-methylpropan-2-amine |
| InchI Identifier | InChI=1S/C8H22N2Si/c1-7(2,3)9-11-10-8(4,5)6/h9-10H,11H2,1-6H3 |
| InchI Key | VYIRVGYSUZPNLF-UHFFFAOYSA-N |
Known applications and external links
With Bis(t-butylamino)silane other customers often ask:
Ereztech synthesizes and sells additional SI-compounds.
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