Tris(ethylmethylamido)(tert-butylimido)tantalum(V)
Synonym: (Tert-butylimido)tris(ethylmethylamido)tantalum(V), (t-butylimido)tris(ethylmethylamido)tantalum(V), (tert-Butylimino)[tris(N-methylethanaminato)]tantalum, TBTEMT
CAS Number 511292-99-2 | MDL Number MFCD05663776 | EC Number 633-032-4
Tris(ethylmethylamido)(tert-butylimido)tantalum(V) has been used as a precursor for the deposition of TaN thin films using plasma enhanced atomic layer deposition (PEALD) technique. The TaN films deposited by PEALD exhibited a lower resistivity of 200 – 500 μΩ-cm compared to thermally deposited ALD TaN films (> 1000.μΩ-cm). The density increases to 11-13 g/cm3 compared to 9 g/cm3 for thermal ALD films. See link below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA2992 contact us at sales@ereztech.com
Safety information
| UN | 3399 |
| Hazardous class | 4.3(3) |
| Packing group | II |
| Pictograms |   |
| Signal word | DANGER |
| Hazard statements | H225-H261-H314-H318 |
| Precautionary statements | P210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
| Transport description | Organometallic substance, liquid, water-reactive, flammable (Tris(ethylmethylamido) (tert-butylimido) tantalum(V) |
| In TSCA registry | No (research and development usage only) |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Tris(ethylmethylamido)(tert-butylimido)tantalum(V) below please contact customer support at sales@ereztech.com
External identifiers for TBTEMT
| Pubchem CID | 4643325 |
| IUPAC Name | tert-butyliminotantalum; ethyl(methyl)azanide |
| SMILES | CC[N-]C.CC[N-]C.CC[N-]C.CC(C)(C)N=[Ta] |
| InchI Identifier | InChI=1S/C4H9N.3C3H8N.Ta/c1-4(2,3)5;3*1-3-4-2;/h1-3H3;3*3H2,1-2H3;/q;3*-1; |
| InchI Key | WUOSVSDQERJZBI-UHFFFAOYSA-N |
Known applications and external links
With Tris(ethylmethylamido)(tert-butylimido)tantalum(V) other customers often ask:
- Pentakis(dimethylamino)tantalum(V)
- Tantalum(V) butoxide
- Tantalum (V) ethoxide
- Tantalum tetraethoxy dimethylaminoethoxide
Ereztech synthesizes and sells additional TA-compounds.
To purchase TA2992 contact us at sales@ereztech.com
