Tantalum tetraethoxy dimethylaminoethoxide
Synonym: Tantalum tetraethoxide dimethylaminoethoxide, Ta(OEt)4(DMAE)
CAS Number 172901-22-3 | MDL Number MFCD01861972
Tantalum tetraethoxy dimethylaminoethoxide and Titanium bis-ethoxide bis-dimethylaminoehtoxide were used as precursors for Ta2O5 and (TiO2)-(Ta2O5) films have been deposited on silicon at low temperature by Injection Metallorganic Chemical Vapor Deposition (IMOCVD). The influence of deposition conditions on the deposition process and structural properties of the films has been studied by FTIR, EPMA and XRD. This product has been used as a precursor of the first tantalum pentoxide dielectric films as deposited by the new technique of low-pressure ultraviolet-assisted injection liquid source (UVILS) chemical vapour deposition (UVILS-CVD). See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA1223 contact us at sales@ereztech.com
Safety information
| UN | Not regulated |
| Hazardous class | Not regulated |
| Packing group | Not regulated |
| Pictograms |  |
| Signal word | WARNING |
| Hazard statements | H303-H313-H315-H319-H332-H335 |
| Precautionary statements | P261-P264+P265-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P311-P312-P332 + P313-P337 + P313-P362 |
| Transport description | NONH for all modes of transport |
| In TSCA registry | No (research and development usage only) |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Tantalum tetraethoxy dimethylaminoethoxide below please contact customer support at sales@ereztech.com
External identifiers for Ta(OEt)4(DMAE)
| Pubchem CID | 87224138 |
| IUPAC Name | 2-(dimethylamino)ethanol;ethanol;tantalum |
| SMILES | CCO.CCO.CCO.CCO.CN(C)CCO.[Ta] |
| InchI Identifier | InChI=1S/C4H11NO.4C2H6O.Ta/c1-5(2)3-4-6;4*1-2-3;/h6H,3-4H2,1-2H3;4*3H,2H2,1H3; |
| InchI Key | YODRYJGUVQEOOL-UHFFFAOYSA-N |
Known applications and external links
- C. Jiménez, M. Paillous, Roland Madar, J.P. Sénateur, A.C. Jones Deposition of Ta2O5 and (TiO2)-(Ta2O5) films from Ta(OEt)4(DMAE) and Ti(OEt)2(DMAE)2, by IMOCVD
- M.B.Mooneya, P.K.Hurleya, B.J.O’Sullivana, J.T.Beechinora, J.-Y.Zhang, I.W.Boyd, P.V.Kellya, J.-P.Sénateurc, G.M.Creana, C.Jimenezc, M.Paillousc Characteristics of tantalum pentoxide dielectric films deposited on silicon by excimer-lamp assisted photo-induced CVD using an injection liquid source
With Tantalum tetraethoxy dimethylaminoethoxide other customers often ask:
- Pentakis(dimethylamino)tantalum(V)
- Tantalum(V) butoxide
- Tantalum (V) ethoxide
- Tris(diethylamido)(tert-butylimido)tantalum(V)
Ereztech synthesizes and sells additional TA-compounds.
To purchase TA1223 contact us at sales@ereztech.com
