Tris(diethylamido)(ethylimido)tantalum(V)
Synonym: Tris(diethylamino)
CAS Number 67313-80-8 | MDL Number MFCD03093879 | EC Number 633-181-5
Tris(diethylamido)(ethylimido)tantalum(V) has been used as a precursor for Ta2O5 thin films deposition as well as highly conformal atomic layer deposition of tantalum oxide. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA3808 contact us at sales@ereztech.com
Safety information
| UN | 2924 |
| Hazardous class | 3(8) |
| Packing group | II |
| Pictograms |   |
| Signal word | DANGER |
| Hazard statements | H225-H314-H318 |
| Precautionary statements | P210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
| Transport description | FLAMMABLE LIQUID, CORROSIVE, N. O.S. (Tris(diethylamido)(ethylimido) tantalum(V)) |
| In TSCA registry | No (research and development usage only) |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Tris(diethylamido)(ethylimido)tantalum(V) below please contact customer support at sales@ereztech.com
External identifiers for Ta(NEt)(NEt2)3
| Pubchem CID | 4067399 |
| IUPAC Name | diethylazanide;ethyliminotantalum |
| SMILES | CC[N-]CC.CC[N-]CC.CC[N-]CC.CCN=[Ta] |
| InchI Identifier | InChI=1S/3C4H10N.C2H5N.Ta/c3*1-3-5-4-2;1-2-3;/h3*3-4H2,1-2H3;2H2,1H3;/q3*-1;; |
| InchI Key | LPVQKHFDFSMBIS-UHFFFAOYSA-N |
Known applications and external links
- Kristin Pfeiffer, Ulrike Schulz, Andreas Tünnermann, Adriana Szeghalmi Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
- Dennis M. Hausmann, Philippe de Rouffignac, Amethyst Smith, Roy Gordon, Douwe Monsma Highly conformal atomic layer deposition of tantalum oxide using alkylamide precursors
With Tris(diethylamido)(ethylimido)tantalum(V) other customers often ask:
- Pentakis(dimethylamino)tantalum(V)
- Tantalum(V) butoxide
- Tantalum (V) ethoxide
- Tantalum tetraethoxy dimethylaminoethoxide
Ereztech synthesizes and sells additional TA-compounds.
To purchase TA3808 contact us at sales@ereztech.com
