Tris(diethylamido)(ethylimido)tantalum(V) 

Synonym: Tris(diethylamino)(ethylimino)tantalum(V), Ta(NEt)(NEt2)3

CAS Number 67313-80-8 | MDL Number MFCD03093879 | EC Number 633-181-5 

Ta(NEt)(NEt2)3-chemical-structure

Product code TA3808
CAS number 67313-80-8
Assay (purity) 99%+
Metal purity 99.99%-Ta
Purity method by gravimetric assay after ignition to oxide
NMR H1 conforms to structure
Molecular weight 440.40 g/mol
Form liquid
Appearance yellow to amber liquid
Molecular formula C14H35N4Ta
Linear formula [(C2H5)2N]3Ta(C2H5N)
Packaging glassware/metal containers/bubblers

Tris(diethylamido)(ethylimido)tantalum(V) has been used as a precursor for Ta2O5 thin films deposition as well as highly conformal atomic layer deposition of tantalum oxide. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA3808 contact us at sales@ereztech.com

Safety information

UN 2924
Hazardous class 3(8)
Packing group II
Pictograms GHS02
Signal word DANGER
Hazard statements H225-H314-H318
Precautionary statements P210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport description FLAMMABLE LIQUID, CORROSIVE, N. O.S. (Tris(diethylamido)(ethylimido) tantalum(V))
In TSCA registry No (research and development usage only)

First Aid Measures

General advice Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact Wash off with soap and plenty of water. Consult a physician.
Inhalation If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(diethylamido)(ethylimido)tantalum(V) below please contact customer support at sales@ereztech.com

 

External identifiers for Ta(NEt)(NEt2)3

Pubchem CID 4067399
IUPAC Name diethylazanide;ethyliminotantalum
SMILES CC[N-]CC.CC[N-]CC.CC[N-]CC.CCN=[Ta]
InchI Identifier InChI=1S/3C4H10N.C2H5N.Ta/c3*1-3-5-4-2;1-2-3;/h3*3-4H2,1-2H3;2H2,1H3;/q3*-1;;
InchI Key LPVQKHFDFSMBIS-UHFFFAOYSA-N

Known applications and external links

With Tris(diethylamido)(ethylimido)tantalum(V) other customers often ask:

Ereztech synthesizes and sells additional TA-compounds.

To purchase TA3808 contact us at sales@ereztech.com